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First archived on: 2013-05-23

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... role of ICT Information and Communication Technologies nanotechnologies is growing Today laser interferometers are the essential tool for metrology in semiconductor manufacturing where they are used for pattern placement measurements on photomasks and for position control in wafer scanners A particularly strong requiremrt is metrology to support the the use of double patterning techniques where the accuracy demands of dimensional measurements are rapidly growing For mask metrology tools a reproducibility...

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Country code: IT
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